What is Microloading effect?
What is Microloading effect? The microloading effect is a phenomenon in which fewer fluorine radicals transport the bottom of narrow gaps, causing the etch rate to decrease depending on pattern width. This phenomenon is also known as the RIE lag effect or ARDE (aspect ratio dependent etching). How is etch selectivity calculated? Etch selectivity is the ratio of etch rates between materials. The formula for etch selectivity is Selectivity = Etch Rate A/Etch Rate B. It is often used when describing the relative etch rates between a mask (used for patterning) and the etch rate of the material of interest....